NUFAB postdoctoral fellow Serkan Butun attended the 2018 Mid Atlantic Electron Beam Lithography (MAEBL) Workshop. The workshop is designed to connect novice and experienced EBL tool owners and users to openly exchange practical and directly applicable EBL knowledge in an open forum format. The event features invited talks from users in the field. This year’s event brought together EBL managers from all around the nation such as uPenn, MIT, Brookhaven NL, Ohio State, University of Santa Barbara and Princeton University. Crucial topics such as proximity effect correction, resist storage and process challenges were discussed.

Serkan poses in front of a sign for the workshop.

Participants listen to a speaker at the workshop.